FA Business

Solar Cell用 ALD TOOL

iOV M5000 ALD System for Large Glass Deposition
Atomic Layer Deposition
HVM ALD System for LARGE SIZE rigid panel (ex. CIGS PV)
Buffer layer deposition
High-throughput (>100 panels / System *hr) :
1 System has 8 chamber
1 chamber has 10 panel loading.(but variable up to 15 panels per requirement)